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1精領行行立隆參年論利論論理論論精聯(07)652-6595降見料切不降令2兩數理降令降度路例不行說論降參參說(1)TITMS2812DSP(2)降a.b.PP/VPIPIDc.50micron10micron(3)行度量100mm/s200mm/s300mm/s度度度(4)降不+/-1micron精度離數讀料來PID(non-linearPID)PID(time-delayPID)說降令兩令1PIDPP/VPI兩2PIDPP/VPI理PID例(PD)PP/VPI例(P)sKKsGdp+=)(0pPsG=)(03Two-axissynchronizedelevationmachinePositioncommandx+_PP/VPIcontrolorPIDcontroly+_PDcontrolPDcontrol+_+_++++PP/VPIcontrolorPIDcontrolmotordrivermotordriverr1令Two-axissynchronizedelevationmachinemaster+_PP/VPIcontrolorPIDcontrolslave+_PP/VPIcontrolorPIDcontrolmotordrivermotordriverPDcontrol++_+Positioncommandrxy2利降4