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932001INER0122004.11.30iplasmaimmersionionimplantationPIIITi6Al4VPIIIPIIIPIII20kVPIIITi6Al4VPIIIiiAbstractInthisresearchproject,acomprehensivecomputercodeinsimulatingplasmaimmersionionimplantation(PIII)techniquesforsurfacemodificationofbiologicalmaterialshasbeendeveloped.Additionally,thesurfacemodificationeffectsofbiologicalmaterial(suchasTi6Al4V)arestudiedindepthusingthiscode,andthecalculatedresultsarecomparedtothoseofexperimentalones.Inthecode,theincidentionsaresimulatedsincetheyareextractedfromtheplasmaandacceleratedtothetargetbymeansofanegative-pulsevoltageappliedatthetarget.Inadditiontothecollisioninteractionbetweenincidentionsandtargetatoms,thesurfacesputteringandioncollectioneffectsduetoionbombardment,andthediffusioneffectinionimplantationatelevatedtemperaturesweretakenintoconsideration.Inshort,theevolutionsofimplanted-iondepthprofilesaswellastheoptimalPIIIprocessingparameterscanbeobtainedinthecode.ThegoodagreementbetweenexperimentalandcalculatedresultsindicatedthatthecodehasbeensuccessfullydevelopedandcanbeworkedasanimportanttheoreticaltoolinordertorealizethepracticalapplicationsofPIIItechniquesinsurfacemodificationofbiologicalmaterials.iii…………………………………………………......…….…i………………………………….………………..……..…iii………………………………….…………....…….…v…………………………………………........…….…vi……………………………………………......………1………………………………………………......……2………………………………………………......……43.1........................................................................43.1.1……………………………………..43.1.2……………………………………..53.1.3………………………………………......63.1.4………………………………………..83.2........................................................83.3................................................................................8................................................................................104.1......................................................104.2PIII...........................114.3..............................11iv4.4..........................12................................................................................14....................................................................................16v20kVPIII……………………………………………..…18PIIIt=0…………………………………………..…19PIII…………………………………………………..…………19PIII………………………………………………………….….20Ar+N+…………………………………………………......20Ar+N+…………………………………………………….21Ar+N+…………………………………………..................2130kVN2+Ti6Al4V…………………..........................2260kVN2+Ti6Al4V……………………………………..22TI6Al4V………………………………………………..............23PIII20kVTI6Al4V..............................................................................23viPIIITI6Al4V………………………………………………....................24PIIITI6Al4V……………………………………………………………24viiPIIITi6Al4V……....17-1-plasmaimmersionionimplantationPIIIPIIIPIII-2-100[1]Ti6Al4VTi6Al4VTi6Al4VTi6Al4VPIIIPIII-3-PIIIdepthprofilePIII-4-PIII20kVPIIIglowdischargespectrometryGDS3.1PIIImatrixsheathPIIIdynamicsheathmodel[2-5]ioncollectionsputteringthermaldiffusion3.1.1foV)(tJ)(tsosmatrixsheathtotalDiid[6-8]:-5-⎟⎟⎠⎞⎜⎜⎝⎛+⎟⎠⎞⎜⎝⎛ε=4222/32/1)()(1294)(tsstsVmqtJooo(1)3/1132)(⎟⎠⎞⎜⎝⎛+ω=tstspio(2)ooooqnVsε=2(3)∫=pttotaldttJqtfD0)((4)totaliiDkd=(5))/(∑=siiiiinCnk(6)qoε(permittivity)oopis/µ=ωmqVoo/2=µmptftiki3.1.2i)(xN)(xNi-6-∑⎟⎟⎠⎞⎜⎜⎝⎛σ−−πσ=ipipipiiRxdxN2222)(exp2)((7)piRiprojectedrangepiσirangestragglingpiRpiσSRIM[9]3.1.3sputteringerosionretaineddosePIII)(EYssputteringyieldEYamamura[10]:,])/(1[)](35.01[)(42.0)(8.22/1EEsUUESQEYthessns−ε+α=(8)sUnSnuclearenergyloss]708.1882.6(6.35512.718)(ln441.3[)()(478.8)(2/13/23/2−εε+ε++εε++=tiittinMMMZZZZESi(9)-7-iMtMiZtZeselectronicenergyloss2/14/33/23/22/13/22/12/32/3)()(079.0)(ε++=εtittitieZZZZMMMMsi(10))eV()()(03255.02/13/23/2EMMMZZZZtittiti++=ε(11)α29.14.0)/(0145.0)/(164.008.0ititMMMM++=α(12)QQsU[10]thE])/(134.0)/(8.39.1[24.11ititsthMMMMUE++=−(13)vxtx′xx′tvxx+=′(14)tsNYvφ=(15)φions/cm2-sect),(txN:dtt,tvxGtxNt∫′′+=0)(),((16)-8-]2)(exp[2),(22pppRRxRtxG∆−−∆πφ=(17)])2(erf)2(erf[2)t,(ppppstRRxRRtvxYNxN∆−−∆−+=(18)),(txGt)(tNR∫∆−−∆−+=∞0dx)]2(erf)2(erf[2)(ppppstRRRxRRtvxYNtN(19)3.1.4:),(),(),(22txGxtxNDttxN+∂∂=∂∂(20)kTEodeDD/−=(21)DoDdETi6Al4VoD=0.21cm2s-1dE=2.32eV[11]3.2finitedifferencemethodLivermoreLSODELivermoreSolverforOrdinaryDifferentialEquation[12]PIIIgradient-9-3.320kVPIIIPIII1electroncyclotronresonanceECR23452×1010~2×1011ions/cm3[13-14]1.5×10-6torr10-3torr1-20kV1-20µs1-1500Hz25600°Cthermalcouple2mmpyrometer±10°CTi6Al4V4cm0.5mm20LECOGDS-850QDP-10-Ti6Al4V4.1PIIIs12104.1×cm-31eV~fewns~1µs≥5µs)1010cm-3s10µ-11-4.2PIII(4)PIIItotalD[15]3/12/1o6/13/2o6/13/1o2/13/12)32(ptotaltVMnqftD−−ε=(22)(22)totalDPIIItfon2/3oV1/2pt1/3q1/6M1/6PIIItotalDPIII4.3Ti6Al4V90wt%6wt%4wt%Ar+N+10keV50keV-12-PIII3060kV+2NTi6Al4VTi6Al4VTi6Al4VTi6Al4VTi6Al4V3060kV+2NTi6Al4V30kV+2N17105×N+/cm260kV+2N18102×N+/cm225°CPIII20kV+2NTi6Al4VPIIIPIIITi6Al4V4.4PIII-13-PIIIRinner[16]Fouquet[17]Ti6Al4V500°CTi6Al4V300400500600°CTi6Al4VPIIIPIII500°C[16,17]600°CPIII-14-PIIIPIIITi6Al4VPIIIPIIIPIIIPIIITi6Al4V1PIIITi6Al4VPIII2PIII500oCTi6Al4V3PIIITi6Al4VPIII-15-Ti6Al4V-16-[1],“2000-2001,=226[2]P.J.Wilbur,J.A.Davis,R.Wei