微焦点X射线分层成像无损检测方法

X,,,,,(,100084):,X,,,,:;;;:TG115.28;TL82;TL99:A:100026656(2002)0520185203MICROFOCUSX2RAYLAMINOGRAPHYLIZheng,WANGJing,CHENGJian2ping,WANGXue2wu,NIJian2ping,KANGKe2jun(DepartmentofEngineeringPhysics,TsinghuaUniversity,Beijing100084,China)Abstract:Theinspectionoftheflatcomponentswithcomplexstructuresandprintedcircuitboard(PCB)isanimpor2tantapplicationofnondestructivetestingandrequiressophisticatednondestructivetestingmethods.Basedonthemicrofo2cusX2rayradiationimagingsystem,anewreconstructionmethodhasbeenputforward.Theobjectscanbeanalyzedbyusingcomputedlaminography(CL)whichrequiresasimpleswingoftheobjectinspected.TheobjectisirradiatedbytheX2raysourceunderdifferentangles.Imageprocessingcanbeappliedincombinationwiththemulti2planereconstructionforresolutionandcontrastenhancement.Linearreconstructionalgorithmisbasedonthefilteredorunfilteredbackprojec2tionoraveragingmethodrespectively.Non2linearreconstructioncanbederivedfromthemethodsforobjecttracing.Keywords:Radiographicinspection;Digitallaminography;Composite;Printedcircuitboard,,,,,,,,,,,,,:2001202219:(19705006),,,,1(1,2)(3)X,(),,,,58124520025NDTVol.24No.5May2002©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.123,,,,,,,,,,,,,,,,,[1]2(),,(),,(),X,,,,,,,,(),,,,[24]3,,,X,,,,X,,,X,,,,,,,,,44CT,4681:X©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,(,)1,,,,[5]11PB=1nn1Image(i)di,PFB=1nn1FiltImage(i)di,PMax=maxn-11[Image(i),Image(i+1)],PMin=minn-11[Image(i),Image(i+1)],PCo=PB{corn-11[Image(i),Image(i+1)]thresh},,,,(5),X,,,,656:[1]EwertU,RobbelJ,BellonC,etal.Digitallaminogra2phy[J].MaterialPrfung,1995,37(6):218-222.[2]GondromS,SchrÊpferS.Digitalcomputedlaminographyandtomosynthesisfunctionalprinciplesandindustrialap2plications[A].DGZfPProceedings[C].Berlin:1999.45(3):75-81.[3]GondromS,ZhouJ,MaislM,etal.X2raycomputedlaminography:anapproachofcomputedtomographyforapplicationswithlimitedaccess[J].NuclearEngineeringandDesign,1999,190(1):141-147.[4]DanovichZ,SegalY.LaminogramreconstructionthroughregularizingFourierfiltration[J].NDT&EInternational,1994,27(3):123-130.[5],,,.X[J].,2000,23(3):159-163.200220021115,8,::©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.