台式多功能声显微镜的研制

(,100084)THSAM2MPC109ösAöD,1100MHz;,A,B,C,B,C,,,DEVELOPMENTOFATABLEMULTIPURPOSESCANNINGACOUSTICMICROSCOPEChenGelinLiuLifangLongMengWangAibao(Dept.ofElectronicEngineering,TsinghuaUniversity)AbstractTHSAM2Mmultipurposescanningacousticmicroscopewasdeveloped.Asuperhigh2speedAöDconvertercard,ofwhichthesamplingrateisover109samplesös,andafastpulsegeneratorösignalreceivercardwereinsertedinPCslots.Thefunctionsofthesystem,includingtesting,processinganddisplay,wererealizedbysoftware.Theoperationfrequencyrangewas1to100MHz.TheA,BandCscanscouldbeaccomplishedatthesametimeandtheirreal2timeresultsweredisplayedonthescreenofPCterminal.Whentestwasover,multi2layerBandCscansand3Dimagecouldbeobservedfromtheobtaineddata.Thesystemwassuccessfullyappliedinmanyfieldsandusefulresultswereobtained.KeywordsScanningacousticmicroscopeThree2dimensionalimagingComputertechnologyA,B,C,,(NDT)(NDE)[1],,A,B,C,THSAM2M(1)PCAöD,,1100MHz,A,B,CV(z),C,1THSAM2M,,[2,3]1THSAM-M5352212200012NDTVol.22No.12Dec.2000©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.2AöD1.1THSAM2M(1)öAöD,[4]1.1.110MHz36YLiNbO3,10MHzPZT1.1.2THSAM2M,,,PC1.1.3,AöD,(1)300V,,AöD(2)AöDAöD,2,,AöD109ös,8bits,,,,,1.1.4THSAM2M,,;,,,;,(3):3(1)(2)(3)AöD(4)A,BC,1.2,,AöD,,,,AöD,AöDMallat[5],635:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.Akima[6],,4(a)(b)(c)4,AB,C,A,B,C10min2,,THSAM2M[7]UdxdM,ydM,zdM=mVh(x0,y0,z0)õR(xs-x0,ys-y0,zs-z0)õdx0dy0dz0Udxd,yd,zdxs,ys,zshRA,,,B,(z)yyh(y0,z0)C,x0,y0x0,y0h(x0,y0),x0,y0z0,h(x0,y0,z0)R(xs,ys,zs),[8]3THSAM-M3.1,,,,,A,,,,,A,B,C3.2C55C735:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.(a)(b)(c)6C(a)(b)1(c)27B()C()(5mm5mm1mm)6BC77,,,4,,81089107c30mm30mm15mm,11a(a)(b)11(576)835:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.(538)11b5THSAM2MPCPC,,AöD,PC,B,C,THSAM2M1100MHzAöD109ös,8bits80dB,40dB300V,10nsA,B,C;B,CC,1ö5,1,,..,1994,19(4):241-2512ShiraiY.Three2dimensionalComputerVision.Berlin:Springer2Verlag,1987.103BriggsA.AcousticMicroscopy.Oxford:OxfordSci2encePublication,1992.1274..:,1991.585..:,1998.196..:,1992.1377WickramasingheHK.JournalofAppliedPhysics,1979,50(2):6648..:,1998.126:19992092136752212200012NDTVol.22No.12Dec.2000©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.