全英文国外知名企业PECVD培训PPT

nVacuumFundamentalsUsethebasicterminologyforvacuumtechnologyExplainwhatavacuumisExplainwhyavacuumisnecessaryforsomeprocessnVacuumFundamentalsDiscussthetwoimportanttypesofgasflowDescribetheeffectoftemperatureandpressureonavolumeofgasUsetheterm“throughput”todescribevacuumsystem,pumpoperationandgasloadnVacuumcomesfromtheLatin“vacua”*Avacuumisonlyreally..onlypartiallyempty.n?Vacuum!EvangelistaTorricellinForceForceEqualizednForceForceUnderPressure!nForceUnderVacuum!ForceForcenHowisavacuumproduced?nVacuumPumpWorkChambernTypesofVacuumRoughVacuum(approx.759to1Torr)nTypesofVacuumHighVacuum(approx.1x10to1x10Torr)MediumVacuum(approx.1Torrto1x10Torr)nTypesofVacuumRoughtoMediumVacuum(approx.759to1x10Torr)UltrahighVacuum(Lessthan1x10Torr)HighVacuum(approx.1x10to1x10Torr)nAtmosphericPressure(Standard)=PressureEquivalents0psig(gaugepressure)14.7poundspersquareinch(psia)29.92inchesofHg760mmofmercury760torr760,000milltorrormicrons101,325pascal1.013bar1013millbarnRoughVacuumHighVacuumUltrahighVacuumWhereisVacuumUsed•Foodprocessing•Evaporation•Freezedrying•Distillation•Sputtering•Electricalconduction•Tubeprocessing•Heattreating•Integratedcircuitmanufacture•Decorativecoating•Particleacceleration•Chemistryresearch•E-beamwelding•Vapordeposition•IonimplantationInsulation(thermal)•Spaceresearch•Materialsresearch•Metallurgy•Physicsresearch•Surfaceanalysis•MolecularbeamepitaxynOneWord:CLEAN!nWhatgasesarewetryingtoremove?Gas%byVolumeNitrogen78.08Oxygen20.08Argon0.93CarbonDioxide0.03Neon0.0018Helium0.0005Krypton0.0001Hydrogen0.00005Xenon0.0000087Note:WaterVaporis0.6to6%.nGasFlowGasmoveslikeaafluidViscousFlow:Gasoccupyingaspaceat1x10torrormorenVacuumPumpWorkChamber*ViscousFlow*nGasFlowMovementisunpredictable(random)MolecularFlow:MoleculesaresofarapartthattheynolongerhaveinfluenceoneachothernVacuumPumpWorkChamber*MolecularFlow*nMeanFreePathDistanceincreasesasthepressuredecreasesTheaveragedistanceagasparticletravelsbeforestrikinganotherparticlenMeanFreePathMolecularDensityandMeanFreePath7.6x10Torr(atm)3x10moleculespercm(30milliontrillion)2x10in.nMeanFreePath(cont.)MolecularDensityandMeanFreePath1x10Torr4x10moleculespercm(40trillion)2in.nMeanFreePath(cont.)MolecularDensityandMeanFreePath1x10Torr3x10moleculespercm(30million)30minVacuumGaugesnVacuumGagesListthecommonlyusedvacuumgaugesGivethepressurerangeinwhicheachofthesegaugesoperatesExplainhowthesesgagesworkDescribehowthesegagesaremaintainednBOURDONGAUGEPIRANIGAUGECOLDCATHODEGAUGERESIDALNITROGENANALYZERIONIZATIONGAUGERESIDUALGASANALYZERCAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesnBOURDONGAUGETORR101010101010101010VacuumGaugesnVacuumGaugesBOURDONGAUGEnVacuumGaugesVACUUMBOURDONGAUGEnBOURDONGAUGECAPACITANCEMANOMETERTORR101010101010101010VacuumGaugesnVacuumGaugesnSENSORBODYANDDIAPHRAGMASSEMBLYELECTRODECONNECTIONSCAPACITORELECTRODEPPORTPRPORT(DIFFERENTIALONLY)VacuumGaugesnVacuumGaugesABSOLUTEEVACUATEDANDSEALEDDIFFERENTIALELECTRODESPRPXPPXPnDEMODULATORSENSORPREAMP15VSUPPLYAMPLIFIER(DC)AMPLIFIERS(AC)58VSUPPLYOSCILLATOR10kHz0-10VOUTPUTCONNECTOR0-10VVacuumGaugesnBOURDONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesnVacuumGauges(+)(-)ControlUnitnVacuumGauges(+)(-)FILAMENTTHERMOCOUPLEMETERnBOURDONGAUGEPIRANIGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesn(+)(-)FILAMENTVacuumGaugesnVacuumGaugesPOWERSUPPLYCOMPENSATORTOSYSTEMREGULATESHEATTOTHELAMPSORRESISTORSBALANCESMETERTO0PATH1PATH2nBOURDONGAUGEPIRANIGAUGEIONIZATIONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesnVacuumGaugesnVacuumGaugesnBOURDONGAUGEPIRANIGAUGERESIDALNITROGENANALYZERIONIZATIONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesnVacuumGaugesnIONSOURCEQUADRUPOLEMASSFILTER(+)RF(-)RFCOLLECTORVacuumGaugesnVacuumGaugesnVacuumSystemsnVacuumSystemsEvaluatethemajortypesofvacuumsystemsDescribehowtobuildthemajortypesofoperatingsystems•DiscusstheproperstepstooperateavacuumsystemRecognizenormalandabnormaloperationofavacuumsystemnHighPumpSpeedHighThroughputUpperLimit10torrLowOperatingCostModerateInitialCostSmalltoVeryLargeSizeNoOilSealingToleratesParticulates,Oxygen,EtchantsRequiresMechanicalPumpCriticalMechanicalToleranceBearingRequireCoolingandLubricationLowerlimit10torrNoisyAdvantagesDisadvantagesnArNVentValveSlowPumpValveForelineValveRoughingPumpw/BoosterSealedDoorArNeedleValveUPCSealedDoorVacuumSystems-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGagenHi-VacValve(GateType)ThrottleValveRoughingPumpw/BoosterSlowPumpValveNVentValveSealedDoormTorrProcessGasMassFlowController-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGageVacuumSystemsManometerGagenFastRecoveryfrom“Dumping”FastStart-upConstantSpeedClean(noOil)LowOperatingCostHighThrouputSmalltoLargeSizeSensitivetoParticulatesRequiresMechanical(Roughing)PumpHighRPM(Noise