纳米AlN的红外光谱分析

沈阳理工大学学士学位论文I摘要在半导体材料中，氮化铝（AlN）是具有优良综合性能的材料。即具有高的热导率、高的电阻率和相当低的热膨胀系数、硬度适中，抗弯强度超过氧化铝和氧化硼，其抗热冲击性能也很好，抗腐蚀性能也很好。氮化铝(AlN)由于其具有很宽的带隙，在紫外光电子器件领域、新型电子器件和光学技术方面有独特的应用前景。目前，氮化铝粉体合成的方法很多，直流电弧法、直接氮化法、碳热还原法、化学气相沉积法、等离子体合成法等。本文采用的是气相沉积法制备AlN纳米材料，在平行管式炉内放置石英舟，将铝粉用无水酒精混匀后沉积到硅片上，放置到石英舟内，在氩气的保护下或者真空环境下，进行AlN纳米材料的制备研究，研究的结果表明：随着温度的升高，AlN纳米结构的形貌发生变化，测量不同形貌的AlN纳米材料红外光谱特性，并分析了红外光谱特性。关键词：氮化铝；半导体材料；气相沉积法；红外光谱沈阳理工大学学士学位论文IIABSTRACTInthesemiconductormaterial,aluminumnitride(AlN)isexcellentgeneralpropertiesofthematerial.Namelyhighthermalconductivity,highresistivityandfairlylowcoefficientofthermalexpansion,hardnessmodest,bendingstrengthmorethanaluminaandoxidationboron,itsinsulcastisverygoodalso,corrosionresistanceisverygoodalso.Aluminumnitride(AlN)sinceithaswidebandgapinultravioletlight,electronicdevices,newelectronicdevicesandfieldopticaltechnologyhasauniqueapplicationprospect.Atpresent,nitridingaluminumbodytosynthesizemanymethods,directnitridingmethod,carbonhotreductionmethod,chemicalvapordeposition,plasmasynthesismethod,etc.ThisarticleUSESthevacuumsintering,thenanoispreparationAlNcrystal,inparallelpipefurnaceShiYingZhouplace,withnowaterwillaluminummixedalcoholtosliceofsilicondeposition,dryplacetoShiYingZhouinside,inammoniagasundertheprotectionoftheenvironmentorinavacuum,thepreparationofAlNcrystal,theresultsofthestudyshowthat,withtheincreaseoftemperaturesinteringofgradualchangeinALproducts,andin950℃forcubicAlNbegantochange.HightemperaturemeasurementofAlNplasmasinteringcrystalinfraredspectraofcharacteristics,andanalyzes.theInfraredspectrum.Keywords:Nitridingaluminum；Semiconductor；Vapordeposition；Infraredspectrum沈阳理工大学学士学位论文III目录目录........................................................................................................................................III第一章绪论............................................................................................................................11.1研究的目的与意义....................................................................................................................11.2氮化铝的性质及其研究进展..................................................................................................11.3氮化铝的制备.............................................................................................................................51.3.1直接氮化法......................................................................................................................51.3.232OAl碳热还原法..........................................................................................................61.3.3化学气相沉积法.............................................................................................................71.3.4等离子体气相合成法....................................................................................................7第二章气相沉积法的工艺过程..............................................................................................92.1气相沉积法实验设备及过程简介.........................................................................................92.1.1平行管式炉......................................................................................................................92.1.2压片机.............................................................................................................................102.1.3超声波清洗器................................................................................................................112.1.4电子天平.........................................................................................................................122.2气相沉积法原理.......................................................................................................................12第三章气相沉积法制备氮化铝..............................................................................................143.1气相沉积法制备氮化铝的参数和实验过程.....................................................................143.1.1实验药品.........................................................................................................................143.1.2实验..................................................................................................................................143.1.3氮化铝的制备.............................................................................................................15第四章纳米氮化铝的红外吸收光谱分析............................................................................164.1红外光谱分析原理..................................................................................................................164.2红外光谱分析的应用.............................................................................................................164.3实验数据图分析.......................................................................................................................174.4数据图对比、分析.....................................................................................................19第五章结论............................................................................................................................22致谢...................................................